Method of passivating group III-V surfaces

Details Method of passivating group III-V surfaces Method of passivating group III-V surfaces

1994-03-11

1997-02-04

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

H01L 21302

Patent

active

055997481

ABSTRACT:
A method of passivating a surface of a Group III-V compound substrate comprising exposing the surface to a solution comprising P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S for a time sufficient to prevent formation of segregated surface atoms and oxides on the substrate surface, thereby minimizing the density of surface states thereof, the solution containing P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S in a ratio.

REFERENCES:
patent: 5407869 (1995-04-01), Holloway et al.

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