Method of passivating group III-V surfaces

Details Method of passivating group III-V surfaces Method of passivating group III-V surfaces

1991-11-06

1995-04-18

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437235, H01L 2102

Patent

active

054078695

ABSTRACT:
A method of passivating a surface of a Group III-V compound substrate comprising exposing the surface to a solution comprising P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S for a time sufficient to prevent formation of segregated surface atoms and oxides on the substrate surface, thereby minimizing the density of surface states thereof, the solution containing P.sub.2 S.sub.5, S and (NH.sub.4).sub.2 S in a ratio.

REFERENCES:
Hwang, A study of new surface passivation using phosphorus sulfide/ammonium sulfide (P.sub.2 S.sub.5 /(NH.sub.4).sub.2 S) on gallium asrenide Schottky barrier diodes, chemical Abstracts, CA112(20): 189735p, J. Appl. Phys. 67(4), 15 Feb. 1990, pp. 2162-2165.

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