Metal fusion bonding – Process – With condition responsive – program – or timing control
Patent
1989-10-05
1991-01-15
Ramsey, Kenneth J.
Metal fusion bonding
Process
With condition responsive, program, or timing control
228103, 2281802, 228105, 29833, 29840, H01L 2158
Patent
active
049847317
ABSTRACT:
The inventive method for packaging electronic component parts on a substrate by eutectic bonding after the substrate has been heated to exceed the eutectic temperature is designed to observe the thermal expansion of the substrate with a camera and moves the substrate stage in accordance with the observation result so as to modify the mount coordinates of the component part, thereby compensating the displacement of component parts caused by the substrate thermal expansion.
REFERENCES:
patent: 4586247 (1986-05-01), Murai et al.
patent: 4896418 (1990-01-01), Yearsley
patent: 4899921 (1990-03-01), Bendat et al.
patent: 4927068 (1990-05-01), Naka et al.
Matsushita Electric - Industrial Co., Ltd.
Ramsey Kenneth J.
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