Method of orientating a template with respect to a substrate...

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C430S030000, C355S072000, C396S428000

Reexamination Certificate

active

07060402

ABSTRACT:
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.

REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4098001 (1978-07-01), Watson
patent: 4119688 (1978-10-01), Hiraoka
patent: 4155169 (1979-05-01), Drake et al.
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4202107 (1980-05-01), Watson
patent: 4355469 (1982-10-01), Nevins et al.
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4552833 (1985-11-01), Ito et al.
patent: 4600309 (1986-07-01), Fay
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4737425 (1988-04-01), Lin et al.
patent: 4808511 (1989-02-01), Holmes
patent: 4826943 (1989-05-01), Ito et al.
patent: 4848179 (1989-07-01), Ubhayakar
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4891303 (1990-01-01), Garza et al.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 4980316 (1990-12-01), Huebner
patent: 4999280 (1991-03-01), Hiraoka
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5074667 (1991-12-01), Miyatake
patent: 5108875 (1992-04-01), Thackeray et al.
patent: 5148036 (1992-09-01), Matsugu et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5169494 (1992-12-01), Hashimoto et al.
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5212147 (1993-05-01), Sheats
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5318870 (1994-06-01), Hartney
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5380474 (1995-01-01), Rye et al.
patent: 5417802 (1995-05-01), Obeng
patent: 5421981 (1995-06-01), Leader et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5431777 (1995-07-01), Austin et al.
patent: 5439766 (1995-08-01), Day et al.
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5468542 (1995-11-01), Crouch
patent: 5527662 (1996-06-01), Hashimoto et al.
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5670415 (1997-09-01), Rust
patent: 5700626 (1997-12-01), Lee et al.
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5743998 (1998-04-01), Park
patent: 5855686 (1999-01-01), Rust
patent: 5895263 (1999-04-01), Carter et al.
patent: 5907782 (1999-05-01), Wu
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5948219 (1999-09-01), Rohner
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6035805 (2000-03-01), Rust
patent: 6096655 (2000-08-01), Lee et al.
patent: 6150231 (2000-11-01), Muller et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6274294 (2001-08-01), Hines
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6383928 (2002-05-01), Eissa
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6388253 (2002-05-01), Su
patent: 6391798 (2002-05-01), DeFelice et al.
patent: 6411010 (2002-06-01), Suzuki et al.
patent: 6455411 (2002-09-01), Jiang et al.
patent: 6482742 (2002-11-01), Chou
patent: 6489068 (2002-12-01), Kye
patent: 6514672 (2003-02-01), Young et al.
patent: 6534418 (2003-03-01), Plat et al.
patent: 6541360 (2003-04-01), Plat et al.
patent: 6561706 (2003-05-01), Singh et al.
patent: 6565928 (2003-05-01), Sakamoto et al.
patent: 6632742 (2003-10-01), Yang et al.
patent: 6635581 (2003-10-01), Wong
patent: 6646662 (2003-11-01), Nebashi et al.
patent: 6677252 (2004-01-01), Marsh
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6703190 (2004-03-01), Elian et al.
patent: 6716767 (2004-04-01), Shih et al.
patent: 6719915 (2004-04-01), Willson et al.
patent: 6730256 (2004-05-01), Bloomstein et al.
patent: 6737202 (2004-05-01), Gehoski et al.
patent: 6743713 (2004-06-01), Mukherjee-Roy et al.
patent: 6767983 (2004-07-01), Fujiyama et al.
patent: 6770852 (2004-08-01), Steger
patent: 6776094 (2004-08-01), Whitesides et al.
patent: 6777170 (2004-08-01), Bloomstein et al.
patent: 6791669 (2004-09-01), Poon
patent: 6842229 (2005-01-01), Sreenivasan et al.
patent: 2002/0093122 (2002-07-01), Choi et al.
patent: 2002/0094486 (2002-07-01), Choi et al.
patent: 2002/0098426 (2002-07-01), Sreenivasan et al.
patent: 2002/0098428 (2002-07-01), Sreenivasen et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0150398 (2002-10-01), Choi et al.
patent: 2002/0167117 (2002-11-01), Chou
patent: 2003/0080471 (2003-05-01), Chou
patent: 2003/0081193 (2003-05-01), White et al.
patent: 2003/0113638 (2003-06-01), Mancini et al.
patent: 2003/0129542 (2003-07-01), Shih et al.
patent: 2003/0215577 (2003-11-01), Wilson et al.
patent: 2004/0007799 (2004-01-01), Choi et al.
patent: 2004/0008334 (2004-01-01), Sreenivasan et al.
patent: 2004/0009673 (2004-01-01), Sreenivasen et al.
patent: 2004/0021866 (2004-01-01), Watts et al.
patent: 2004/0021254 (2004-02-01), Sreenivasen et al.
patent: 2004/0022888 (2004-02-01), Sreenivasen et al.
patent: 2004/0029041 (2004-02-01), Shih et al.
patent: 2004/0036201 (2004-02-01), Chou et al.
patent: 2004/0053146 (2004-03-01), Sreenivasen et al.
patent: 2004/0086793 (2004-05-01), Sreenivasen et al.
patent: 2004/0104641 (2004-06-01), Choi et al.
patent: 2004/0124566 (2004-07-01), Sreenivasen et al.
patent: 2004/0141163 (2004-07-01), Bailey et al.
patent: 2004/0149687 (2004-08-01), Choi et al.
patent: 2004/0163563 (2004-08-01), Bailey et al.
patent: 2004/0168586 (2004-09-01), Baliey et al.
patent: 2004/0169441 (2004-09-01), Choi et al.
patent: 2004/0170771 (2004-09-01), Baliey et al.
patent: 2004/0189994 (2004-09-01), Sreenivasen et al.
patent: 2004/0189996 (2004-09-01), Sreenivasen et al.
patent: 2004/0200411 (2004-10-01), Willson et al.
patent: 2004/0209177 (2004-10-01), Sreenivasen et al.
patent: 2004/0251775 (2004-12-01), Choi et al.
patent: 55-88332 (1980-07-01), None
patent: 57-7931 (1982-01-01), None
patent: 63-138730 (1988-06-01), None
patent: 63-194956 (1988-08-01), None
patent: 02-24848 (1990-01-01), None
patent: 02-92603 (1990-04-01), None
patent: WO 00/21689 (2000-04-01), None
patent: WO 01/47003 (2001-06-01), None
Abstract of Japanese Patent 63-138730.
Abstract of Japanese Patent 55-88332.
Abstract of Japanese Patent 57-7931.
Abstract of Japanese Patent 02-92603.
Translation of Japanese Patent 02-92603.
Abstract of Japanese Patent 02-24848.
Translation of Japanese Patent 02-24848.
Heidari et al., “Nanoimprint Lithography at the 6 in. Wafer Scale,” Journal of Vacuum Science Technology, Nov./Dec. 2000, pp. 3557-3560, vol. B, No. 18(6).
Nerac.com Retro Search, “Reduction of Dimension of Contact Holes”, Aug. 31, 2004.
Nerac.com Retro Search, “Trim Etching of Features Formed on an Organic Layer”, Sep. 2, 2004.
Nerac.com Retro Search, “Multi-Layer Resists”, Sep. 2, 2004.
Hu et al., “Flourescence Probe Techniques (FPT) for Measuring the Relative Efficiencies of Free-Radical Photoinitators”, s0024-9297(97)01390-9;&

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of orientating a template with respect to a substrate... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of orientating a template with respect to a substrate..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of orientating a template with respect to a substrate... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3638993

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.