Method of optical inspection

Details Method of optical inspection Method of optical inspection

1994-10-03

1996-07-02

Jagannathan, Vasu S.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

356359, G01B 1102, G01B 1502

Patent

active

055328172

ABSTRACT:
A method for determining the configuration of a resin portion of an article comprising exposing the article to a light source at a first wavelength and measuring emission of light at a second, different wavelength; wherein the resin contains a moiety containing a structure of the formula: ##STR1## or a moiety which is a reaction product of said moiety in a quantity sufficient to impart fluorescent properties to said resin.

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Heistand et al., "Cycoten 3022 (BCB) for nonhermetic packaging", Proc. SPIE--Int. Soc. Opt. Eng. (1992), vol. 1847, pp. 584-590.
Charles Seifert, Circuits Manufacturing, "A Step Beyond AOI", May 1989, pp. 70-77.
Internaional Application No. PCT/US94/04535, filed Apr. 25, 1994.

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