Method of operating vacuum pump

Electricity: motor control systems – Closed loop speed control system for dc motor with commutator

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318 3, H02P 500

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active

060885084

ABSTRACT:
A vacuum pump for use in an evacuating system for a semiconductor fabrication apparatus is operated at a steady rotational speed to evacuate the semiconductor fabrication apparatus. Then, in response to a signal indicative of an operating state of the semiconductor fabrication apparatus which does not need to be evacuated, the rotational speed of the vacuum pump is reduced to an idling rotational speed, thereby to lower electric energy consumption by the vacuum pump.

REFERENCES:
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patent: 4461633 (1984-07-01), Bodovsky
patent: 4506405 (1985-03-01), Block
patent: 4569319 (1986-02-01), Thoma
patent: 5284180 (1994-02-01), Guo et al.
patent: 5415616 (1995-05-01), Wright
patent: 5553507 (1996-09-01), Basch et al.
patent: 5814913 (1998-09-01), Ojima et al.
Copy of European Patent Office Communication for European Patent Application No. 98116576.4 with European Search Report dated Oct. 27, 1999 .

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