Method of operating vacuum pump

Details Method of operating vacuum pump Method of operating vacuum pump

1998-08-28

2000-07-11

Nappi, Robert E.

Electricity: motor control systems

Closed loop speed control system for dc motor with commutator

318 3, H02P 500

Patent

active

060885084

ABSTRACT:
A vacuum pump for use in an evacuating system for a semiconductor fabrication apparatus is operated at a steady rotational speed to evacuate the semiconductor fabrication apparatus. Then, in response to a signal indicative of an operating state of the semiconductor fabrication apparatus which does not need to be evacuated, the rotational speed of the vacuum pump is reduced to an idling rotational speed, thereby to lower electric energy consumption by the vacuum pump.

REFERENCES:
patent: 4398996 (1983-08-01), Bolton et al.
patent: 4461633 (1984-07-01), Bodovsky
patent: 4506405 (1985-03-01), Block
patent: 4569319 (1986-02-01), Thoma
patent: 5284180 (1994-02-01), Guo et al.
patent: 5415616 (1995-05-01), Wright
patent: 5553507 (1996-09-01), Basch et al.
patent: 5814913 (1998-09-01), Ojima et al.
Copy of European Patent Office Communication for European Patent Application No. 98116576.4 with European Search Report dated Oct. 27, 1999 .

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