Method of non-destructively testing a sputtering target

Details Method of non-destructively testing a sputtering target Method of non-destructively testing a sputtering target

1993-01-14

1995-04-18

Goldstein, Herbert

Measuring and testing

Vibration

By mechanical waves

73616, 73629, 20429803, 20419213, G01N 2900

Patent

active

054068509

ABSTRACT:
A method of quality control for targets intended for use in the sputtering process. A test parameter is established by immersing the target in a tank of liquid, irradiating the target with ultrasonic energy in the Rayleigh frequency range, and integrating the portion of the ultrasonic energy which passes through the target and reflects off the back wall. This test parameter is closely related to the uniformity of a film which may be sputtered from the target onto a substrate.

REFERENCES:
patent: 3914987 (1975-10-01), Bickel et al.
patent: 4334433 (1982-06-01), Takahashi et al.
patent: 4539848 (1985-09-01), Takafuji et al.
patent: 4624127 (1986-11-01), Narushima et al.
patent: 4719583 (1988-01-01), Takafuji et al.
patent: 5038615 (1991-08-01), Trulson et al.
"Scattering Induced Attenuation of Ultrasonic Backscattering", Peter Nagy et al., Dept. of Weld. Eng., Ohio State Univ., pp. 1263-1271.
"Nondestructive Determination of Grain Size . . . ," Hecht et al., Materials Evaluation/39/Sep. 1981, pp. 934-938.
"A New Measurement Method of the Grain Size . . . ," Takafuji et al., Nippon Steel Corp., Japan, pp. 195-200.
"Monitoring material grain size . . . ", Aharoni et al., Appl. Phys. Lett. 59(27) Dec. 30, 1991, pp. 3530-3532.
"Ultrasonic materials characterization," Smith, NDT International, vol. 20, No. 1, Feb. 1987, pp.43-48.
"Ultrasonic Grain Size Evluation of Heat-Treated Stainless Steel," Saniie et al., Dept. of E.& Comp. Eng., Ill. Inst. of Tech. et al.
"Frequency and Grain Size Dependency . . . ," Serabian, British Jour. of NDT, Mar. 1980, pp. 69-77.
Papadakis, E. P. "Methods of Experimental Phy., Ultrasonics," 19 ed. P.D. Edmonds; Academic Press, N.Y. (1981) pp. 237-298.
Smith, R. L., Reynolds, W. N., Wadley, H. N. G., "Met. Sci." 1981, 15, pp. 554-558.
Smith, R. L., Reynolds, W. N., "J. Mat. Sci.," 1982, 17, pp. 1420-1426.
Serabian, S., Williams, R. S., "Materials Evaluation," 1978, 24(3), pp. 55-62.
Hirone, T., Kamigaki, K., "Sci. Rpt. Tohoku Univ. First Series," 1955, A7, pp. 455-464.
Mason, W. P., "Physical Acoustics & the Properties of Solids", (Van Nostrand, N.Y., 1958).
Roth, W. J., "Appl. Phys.", 19, 1948, pp. 901-910.
Mason, W. P., et al., "Appl. Phys.", 19, 1948, pp. 940-946.

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