Method of noise reduction in CCD solid state imagers

Details Method of noise reduction in CCD solid state imagers Method of noise reduction in CCD solid state imagers

1988-05-09

1989-06-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 10, 437 12, 437 13, 437247, 437 2, H01L 2100, H01L 2102, H01L 21477, H01L 3100

Patent

active

048409189

ABSTRACT:
A method to reduce the dark current in CCD solid state imagers is disclosed. This method involves sintering an unpatterned Al film on top of an oxide layer at 450.degree. C. for a time to generate sufficient numbers of atomic hydrogen atoms to diffuse through the oxide layer and passivate the silicon surface states.

REFERENCES:
patent: 3923559 (1975-12-01), Sinha

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