Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1975-10-06
1977-06-21
Ozaki, G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
148188, 357 23, 357 54, H01L 21225
Patent
active
040309525
ABSTRACT:
An improved method of MOS circuit fabrication includes the consecutive steps of formation of a selected material on the surface of an underlying substrate, removal of the selected material from selected portions of the underlying substrate, and formation of insulating material between the selected material and the underlying substrate on the surface of the newly exposed underlying substrate.
REFERENCES:
patent: 3604107 (1971-09-01), Fassett
patent: 3690969 (1972-09-01), Hays et al.
patent: 3825442 (1974-07-01), Moore
patent: 3912558 (1975-10-01), Luce et al.
Luce Robert L.
Perry Joseph P.
Sansburry James D.
Fairchild Camera and Instrument Corporation
MacPherson Alan H.
Ozaki G.
Reitz Norman E.
Woodward Henry K.
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