Method of monolithically fabricating a microspectrometer with in

Details Method of monolithically fabricating a microspectrometer with in Method of monolithically fabricating a microspectrometer with in

1994-02-16

1999-06-01

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356346, G01B 902

Patent

active

059092807

ABSTRACT:
The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

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Jerman et al., "A Miniature Fabry-Perot Interferometer Fabricated Using Silicon Micromachining Techniques" (1988), pp. 16-18.

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