Method of monitoring the path of an annular blade through a semi

Details Method of monitoring the path of an annular blade through a semi Method of monitoring the path of an annular blade through a semi

1990-02-16

1991-07-30

Wieder, Kenneth A.

Electricity: measuring and testing

Magnetic

Displacement

G01B 714

Patent

active

050362747

ABSTRACT:
A plurality of eddy-current sensors are provided with covers made of silicon on the side thereof facing the saw blade, the sensors being disposed in a fixed position relative to the saw blade and at a distance from the side face saw blade which is greater than the intended wafer thickness.

REFERENCES:
patent: 4198006 (1980-04-01), Rolfe
patent: 4205797 (1980-06-01), Bennett, Jr. et al.
patent: 4438754 (1984-03-01), Nanny et al.
Proceedings of the IEEE, vol. 70, No. 5, 05/1982, New York, U.S., pp. 420-457, Kurt E. Peterson; "Silicon as a Mechanical Material", p. 421, last para.
55-124271 12/13/80 Patent Abstracts of Japan, vol. 181, No. 4 (E-037).

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