Method of monitoring semiconductor manufacturing processes and t

Details Method of monitoring semiconductor manufacturing processes and t Method of monitoring semiconductor manufacturing processes and t

1988-02-02

1990-10-16

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG162, H01L 2166

Patent

active

049635000

ABSTRACT:
Method of determining contaminants in a semiconductor processing apparatus in which a high purity, high carrier lifetime semiconductor test wafer is processed and the degradation of its carrier lifetime is determined.

REFERENCES:
patent: 4211488 (1980-07-01), Kleinknecht
patent: 4563642 (1986-01-01), Munakata et al.
patent: 4597166 (1986-07-01), Iwai
patent: 4652757 (1987-03-01), Carver
patent: 4668330 (1987-05-01), Golden
patent: 4707610 (1987-11-01), Lindon et al.

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