Method of modifying a surface of a body using electromagnetic ra

Details Method of modifying a surface of a body using electromagnetic ra Method of modifying a surface of a body using electromagnetic ra

1988-09-16

1990-09-25

Beck, Shrive

Coating processes

Electrical product produced

Welding electrode

427 541, 427 55, 15662072, 156600, 156612, B05D 306

Patent

active

049592459

ABSTRACT:
A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.

REFERENCES:
patent: 4354083 (1982-10-01), Staats
patent: 4547651 (1985-10-01), Maruyama
patent: 4685110 (1987-08-01), DeBell et al.
patent: 4780590 (1988-10-01), Griner et al.
Maissel et al., eds., Handbook of Thin Film Technology, 1970, McGraw Hill Book Co., pp. 11-13 to 15, 11-21 and 11-25.

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