Method of minimizing diffraction groove formation on laser etche

Details Method of minimizing diffraction groove formation on laser etche Method of minimizing diffraction groove formation on laser etche

1996-03-06

1997-11-11

Hoang, Tu B.

Electric heating

Metal heating

By arc

21912178, 606 5, 1283031, B23K 2600

Patent

active

056859988

ABSTRACT:
Laser radiation can be directed through an aperture to a target surface without causing the expected diffraction groove effect by moving the target relative to the stage to which the aperture is attached in such a fashion as to interrupt the diffraction pattern and minimize the production of diffraction grooves.

REFERENCES:
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patent: 4732148 (1988-03-01), L'Esperance
patent: 4770172 (1988-09-01), L'Esperance
patent: 4861964 (1989-08-01), Sinohara
patent: 4973330 (1990-11-01), Azema et al.
patent: 5061342 (1991-10-01), Jones
patent: 5160823 (1992-11-01), Bennin et al.
patent: 5170191 (1992-12-01), Jones
patent: 5219344 (1993-06-01), Yoder
patent: 5296673 (1994-03-01), Smith
Patent Abstracts of Japan, vol. 10, No. 2 (M-444) (2059) 8 Jan. 1986.

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