Method of micromachining electromagnetically actuated current sw

Details Method of micromachining electromagnetically actuated current sw Method of micromachining electromagnetically actuated current sw

1993-12-20

1996-07-02

Donovan, Lincoln

Metal working

Method of mechanical manufacture

Electrical device making

335 78, 200 16B, 216 15, 216105, H01H 1100

Patent

active

055310184

ABSTRACT:
An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a portion of the insulating layer so that the metal bridge extends over the via and the opening is situated adjacent a portion of the sacrificial layer. A reinforcing seal layer with a well is provided over the metal bridge so that the well is situated adjacent to at least a portion of the opening. The sacrificial layer is then removed.

REFERENCES:
patent: 5262000 (1993-11-01), Welbourn et al.
patent: 5374792 (1994-12-01), Ghezzo et al.

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