Method of measuring topology of functional liquid droplet in...

Details Method of measuring topology of functional liquid droplet in... Method of measuring topology of functional liquid droplet in...

2011-04-05

2011-04-05

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07920274

ABSTRACT:
A method of measuring topology of functional liquid in a pixel, in which thickness or volume of the functional liquid in the pixel is measured by a surface topology measuring apparatus comprising: measuring surface topologies in which surface topology of the functional liquid in the pixel and surface topology of the bank are measured by the surface topology measuring apparatus, and measurement parameters regarding the surface topologies are generated; adding a bank height in which a height parameter of a height of the bank is added to the measurement parameter of a surface of the functional liquid in the pixel of the measurement parameter generated; and calculating topology in which the thickness or the volume of the functional liquid in the pixel is calculated based on the added measurement parameter of the surface of the functional liquid in the pixel and the measurement parameter of the surface of the bank.

REFERENCES:
patent: 7321431 (2008-01-01), De Groot
patent: 2002/0177007 (2002-11-01), Chernobrod et al.
patent: 2008/0204502 (2008-08-01), Sakai
patent: 2009/0042320 (2009-02-01), Wang et al.
patent: 2009/0191326 (2009-07-01), Ishizuka et al.
patent: 2000-121323 (2000-04-01), None

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