Method of measuring thickness and refractive indices of componen

Details Method of measuring thickness and refractive indices of componen Method of measuring thickness and refractive indices of componen

1997-06-17

1999-08-24

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

059431342

ABSTRACT:
A light beam emitted by a light source is projected through a collimator lens, a beam splitter and an objective on a sample having a laminated structure. The light beam reflected from the sample travels through the beam splitter to a detector and the detector provides a confocal signal. The detector provides an interference signal upon the reception of the reflected light beam and a reference light beam reflected by a reference mirror. The sample and the reference mirror are moved on the basis of the confocal signal and the interference signal, and the thickness and the refractive index of layer of the sample are determined on the basis of the respective displacements of the sample and the reference mirror.

REFERENCES:
patent: 5465147 (1995-11-01), Swanson

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