Method of measuring the leakage current of a deep trench...

Details Method of measuring the leakage current of a deep trench... Method of measuring the leakage current of a deep trench...

2007-11-20

2007-11-20

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S763010, C324S762010, C438S014000

Reexamination Certificate

active

11176994

ABSTRACT:
The trench leakage current of a deep trench isolation structure is measured. The deep trench isolation structure, which is filled with polysilicon, contacts both a first region of a first conductivity type and a second region of a second conductivity type, and is proximate to a third region of the first conductivity type formed in the second region. Test voltages are applied to the structures and the leakage current is measured.

REFERENCES:
patent: 4520448 (1985-05-01), Tremintin
patent: 5486772 (1996-01-01), Hshieh et al.
patent: 6184048 (2001-02-01), Ramon
patent: 6249138 (2001-06-01), Huang et al.
patent: 6377067 (2002-04-01), Yang et al.
patent: 6859023 (2005-02-01), Yamanaka et al.

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