Optics: measuring and testing – Angle measuring or angular axial alignment – With screen
Patent
1989-04-28
1992-01-14
Rosenberger, Richard A.
Optics: measuring and testing
Angle measuring or angular axial alignment
With screen
356138, G01B 1126
Patent
active
050804847
ABSTRACT:
The invention relates to a method of measuring the contact angle of wetting liquids on a solid surface with which a high measuring accuracy and better reproduceability of the measurement results is achieved. The method resides in that a laser beam is directed onto the interface line between the liquid and the plane solid surface in such a manner that a first part of the laser beam is reflected by the solid surface and a second part by the liquid surface. The second partial beam is used as measuring beam by determining the angle (.delta.) made between the measuring beam and the solid surface, said angle being in a fixed geometrical relationship to the contact angle (r). The contact angles which can be determined very accurately with this measuring method provide information on wetting properties of materials, the exact knowledge of which is of great significance for example for semiconductor fabrication.
REFERENCES:
patent: 3405578 (1968-10-01), Persson
patent: 4688938 (1987-08-01), Demoulin et al.
Rinck Helmut
Schneider Helmut
Hiller William E.
Merrett N. Rhys
Rosenberger Richard A.
Sharp Melvin
Texas Instruments Deutschland GmbH
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