Measuring and testing – Vibration – Sensing apparatus
Patent
1995-03-09
1997-03-11
Williams, Hezron E.
Measuring and testing
Vibration
Sensing apparatus
73661, 7351429, 200 6146, 200 6149, 200 6151, 340669, G01D 2100
Patent
active
056103379
ABSTRACT:
A digital accelerometer manufactured from arrays 11a-11e of micro-mechanical sensing elements 12. The sensing elements 12 of different arrays 11a-11e are designed for detecting acceleration in a particular rotational or translational direction, such that their response to acceleration in other directions is minimized. Further, the sensing elements 12 have size and proof mass parameters that may be adjusted to vary their frequency response and sensitivity to amplitude of acceleration. Arrays 11a-11e of sensing elements 12 provide detection of a range of frequency levels and amplitudes at each frequency. At an appropriate frequency and amplitude of an applied acceleration, a sensing element 12 moves to contact an electrode 126, producing an electrical signal, which may be stored as a data bit. The sensing elements, when used in combination with memory 15 and processing devices 16, results in an intelligent accelerometer whose fabrication techniques are compatible with those used for the digital processing devices.
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Ashraf Nashmiya
Brill Charles A.
Donaldson Richard L.
Kesterson James C.
Texas Instruments Incorporated
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