Method of measuring resistivity, and apparatus therefor

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324715, 324719, 364480, 364550, G01R 2700

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049891545

ABSTRACT:
A method and apparatus for measuring resistivity employ the four-point probe method to measure the surface resistivity or volume resistivity of a sample. The method includes inputting sample shape information and calculating a resistance correction coefficient for the sample based on the shape information and information relating to a measurement position on the sample. The sample surface resistivity or volume resistivity is calculated by multiplying a resistance value, which is measured in accordance with the four-point probe method, by the correction coefficient.

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