Method of measuring porosity by means of ellipsometry and...

Details Method of measuring porosity by means of ellipsometry and... Method of measuring porosity by means of ellipsometry and...

2006-04-28

2009-08-04

Rogers, David A. (Department: 2856)

Measuring and testing

With fluid pressure

Porosity or permeability

C073S037000, C438S007000, C438S014000, C438S016000

Reexamination Certificate

active

07568379

ABSTRACT:
The method for measuring the porosity of an element is performed by means of a measuring device comprising a measuring chamber in which the element is disposed, a solvent tank associated with an adsorption valve, and a pump associated with a desorption valve. The measuring method comprises measurement of the pressure in the chamber by means of a pressure sensor, and a cycle for measuring the porosity by ellipsometry at different predetermined pressure. During this measuring cycle, a pressure controller controls opening of the adsorption and desorption valves according to the measured pressure. The relative pressure in the chamber is successively regulated at different predetermined values, while maintaining a continuous flow of solvent in the chamber between the tank and the pump.

REFERENCES:
patent: 6319736 (2001-11-01), Baklanov et al.
patent: 6435008 (2002-08-01), Baklanov et al.
patent: 6662631 (2003-12-01), Baklanov et al.
patent: 6831742 (2004-12-01), Sui et al.
patent: 6986280 (2006-01-01), Muckenhirm
patent: 7421885 (2008-09-01), Kitzhoffer et al.
patent: 7458251 (2008-12-01), Baklanov et al.
patent: 2001/0054306 (2001-12-01), Baklanov et al.
patent: 2002/0110921 (2002-08-01), Louwen et al.
patent: WO 03/029789 (2003-04-01), None
Baklanov et al., “Determination of pore size distribution in thin films by ellipsometric porosimetry,”Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena, American Vacuum Society, vol. 18, No. 3, May 2000, pp. 1385-1391.

Affiliated with

Also associated with

Rating

Method of measuring porosity by means of ellipsometry and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of measuring porosity by means of ellipsometry and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of measuring porosity by means of ellipsometry and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4080220