Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-02-06
2007-02-06
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559220, C250S201300
Reexamination Certificate
active
10986910
ABSTRACT:
This invention provides a method of measuring semiconductor pattern dimensions capable of realizing a stable and highly precise pattern dimension measurement technique even when the pattern cross-sectional shapes are changed and making the calculation amount relatively small to reduce the calculation time. More specifically, the relationship between cross-sectional shapes of a pattern and measurement errors in a specified image processing technique is evaluated in advance by the electron beam simulation in a pattern measurement system in a length measuring SEM, and in the actual dimension measurement, dimensions of an evaluation objective pattern are measured from image signals of a scanning electron microscope, and errors of the dimensional measurement of the evaluation objective pattern are estimated and revised based on the relationship between cross-sectional shapes of a pattern and measurement errors evaluated in advance, thereby realizing highly precise measurement where dimensional errors depending on pattern solid shapes are eliminated.
REFERENCES:
patent: 4938599 (1990-07-01), Goszyk
Villarubia, J.S., et al—“Scanning Electron Microscope Analog of Scatterometry,” Proceedings of SPIE vol. 4689 (2002)pp. 304-312, USA.
Villarubia, J.S., et al—“A Simulation Study of Repeatability and Bias in the CD-SEM,” Proceedings of SPIE vol. 5038 (2003), pp. 138-149, USA.
Morokuma Hidetoshi
Shishido Chie
Takagi Yuji
Tanaka Maki
Antonelli, Terry Stout and Kraus, LLP.
Hitachi High-Thecnologies Corporation
Le Que T.
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