Method of measuring misalignment between superimposed patterns

Details Method of measuring misalignment between superimposed patterns Method of measuring misalignment between superimposed patterns

1986-09-18

1988-06-14

Anderson, Bruce C.

Optics: measuring and testing

By alignment in lateral direction

356400, 356401, G01B 1100

Patent

active

047508361

ABSTRACT:
A first pattern of circular indicia of the same diameter and of equal spacing is superimposed with an overlapping second pattern of circular indicia of the same diameter as the first pattern indicia. The indicia of the second pattern are in progressively larger spacings in mirror image relation to a central reference indicia. Measurement indicia are adjacent to each indicia of the second pattern. Observation of the most closely aligned indicia of the first and second patterns and the measurement indicia corresponding to that most closely aligned indicia gives a quick visual measurement of the magnitude of the misalignment.

REFERENCES:
patent: 2081936 (1937-06-01), Keenan
patent: 3621582 (1971-11-01), Radencic
patent: 3748043 (1973-07-01), Zipin
patent: 3798782 (1974-03-01), Lindahl
patent: 4388386 (1983-06-01), King et al.
patent: 4481533 (1984-11-01), Alzmann et al.
patent: 4529314 (1985-07-01), Ports

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