Method of measuring image-forming error of projection optical sy

Details Method of measuring image-forming error of projection optical sy Method of measuring image-forming error of projection optical sy

1998-04-14

2000-05-09

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 52, G03B 2742, G03B 2768

Patent

active

060611197

ABSTRACT:
The present invention aims to provide a method of measuring an image-forming error of a projection lens without being influenced by atmospheric temperature at the time of coordinate measurement, and various kinds of applied techniques employing this measuring method. In particular, the measuring method according to the present invention enables errors to be measured with a high accuracy, while taking account of the temperature-dependent extraction or contraction component of the substrate, which is used for measuring the image-forming error.

REFERENCES:
patent: 5117255 (1992-05-01), Shiraishi et al.
patent: 5402224 (1995-03-01), Hirukawa et al.
patent: 5442418 (1995-08-01), Murakami et al.

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