Method of measuring gas purity information, chamber unit and exp

Details Method of measuring gas purity information, chamber unit and exp Method of measuring gas purity information, chamber unit and exp

1993-12-17

1995-11-21

Williams, Hezron E.

Measuring and testing

Gas analysis

By vibration

73 3103, 73 232, G01N 2902, G01N 700

Patent

active

054676371

ABSTRACT:
The sonic velocity in a chamber which is filled with helium is measured by using ultrasonic waves, and the temperature in the chamber is also measured. Purity information relating to helium gas contained in the chamber is determined on the basis of the measured values of the sonic velocity and the temperature.

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