Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1985-11-27
1987-06-23
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 3126
Patent
active
046756019
ABSTRACT:
Electric-field funneling length is measured while irradiating a semiconductor charge-collecting junction with electron-hole-pair generating charged particles at a first junction bias voltage. The bias voltage is then reduced to a second level in order to reduce the depth of the depletion region such that the total charge can no longer be collected by drift and measured in the energy band previously displayed in the multichannel analyzer. This is representative of the maximum electric field funnelling length which may be calculated by measuring the difference at the second bias voltage level of the depletion width and the ion penetration range. The bias voltage is further lowered to a third level at which the particles are collected over a spread of energy levels while at least some of the particles are still collected at the selected energy level. From this the different depths of penetration of the particles are determined while additional effects due to diffusion are minimized.
REFERENCES:
patent: 3659200 (1972-04-01), Ota
patent: 3731192 (1973-05-01), Miller
patent: 3748579 (1973-07-01), Henry et al.
patent: 3808476 (1984-04-01), McCann, Jr.
patent: 3943442 (1976-03-01), Fletcher et al.
patent: 4366493 (1982-12-01), Braslau et al.
patent: 4400710 (1983-08-01), Nishizawa et al.
patent: 4424525 (1984-01-01), Mimura
patent: 4449140 (1984-05-01), Board
patent: 4564808 (1986-01-01), Faughnan et al.
"A Field-Funneling Effect on the Collection of Alpha-Particle-Generated Carriers in Silicon Devices, by Hsieh et al., IEEE EDL-2, #4, 4/81, pp. 103-105.
"Profiling of Optically Active Defects", by Greve et al., IEEE Trans. on Electron Dev., ED-27, #11, 11/80, pp. 2152-2155.
"Determination of Wafer Channel Length of a Mosfet", by Beilstein et al., IBM Tech. Disc. Bull., 8/77, vol. 20, #3, pp. 1085-1086.
C. Hsieh, P. C. Murley, R. r. O'Brien, "Collection of Charge from Alpha-Particle Tracks in Silicon Devices,38 IEEE Transactions on Electron Devices, vol. ED-30, No. 6, pp. 686-693, Jun. 1983.
Malone Carl J.
Zoutendyk John A.
Burns W.
Eisenzopf Reinhard J.
Jones Thomas H.
Manning John R.
McCaul Paul F.
LandOfFree
Method of measuring field funneling and range straggling in semi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of measuring field funneling and range straggling in semi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of measuring field funneling and range straggling in semi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-723818