Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent
1997-05-23
1999-08-24
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
430 30, G03F 900
Patent
active
059423579
ABSTRACT:
Provided is a method of aligning a substrate pattern on a photosensitive surface of a substrate with an image of a mask pattern to be formed on the photosensitive surface by an exposing radiation flux through a projection optical system in a projection exposure apparatus, using an alignment sensor system detecting a positional relationship between the substrate pattern and the image. The method includes the steps of moving the photosensitive surface of the substrate to a plurality of first positions relative to a focal plane at which a focused image of the mask pattern is to be formed through the projection optical system, the plurality of first positions being disposed adjacent the focal plane in a first direction substantially normal to the focal plane, the photosensitive surface of the substrate being substantially parallel to the focal plane at each of the first positions; outputting calibration signals from the alignment sensor system at each of the first positions of the photosensitive surface of the substrate, the calibration signals indicating an offset amount to be used to calibrate the alignment sensor system at each of the first positions; detecting a position of the substrate pattern relative to the image of the mask pattern to be formed on the substrate using the alignment sensor system in accordance with the calibration signals; and aligning the substrate pattern with the image of the mask pattern to be formed in the focal plane in accordance with the detected position of the substrate pattern relative to the image of the mask pattern.
REFERENCES:
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4710026 (1987-12-01), Magome et al.
patent: 4780616 (1988-10-01), Nishi et al.
patent: 4869999 (1989-09-01), Fukuda et al.
Nikon Corporation
Young Christopher G.
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