Optics: measuring and testing – With plural diverse test or art
Patent
1997-10-28
1999-03-23
Evans, F. L.
Optics: measuring and testing
With plural diverse test or art
356311, G01J 342, G01N 2131
Patent
active
058867783
ABSTRACT:
A method of measuring a beam flux rate in a film growth apparatus which includes supplying a hollow cathode lamp with a current that alternates between two current values and does not include a zero current, introducing intensity-modulated spectral light emitted by the hollow cathode lamp into a vacuum chamber of a film growth apparatus, absorbing the light by a beam of atoms projected at a substrate surface, and detecting components synchronized with the modulation of the spectral light obtained.
REFERENCES:
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Komentani et al., J. Vac. Sci. Technol., vol. 12, No. 4, Jul./Aug. 1975, pp. 933-935.
Lu et al., J. Vac. Sci. Technol. A, vol. 13, No. 3, May/Jun. 1995, pp. 1797-1801.
Y. Kasai, et al., "MBE Growth of BiSrCaCuO Films Using Flux Monitoring by Atomic Absorption Spectroscopy", Advances In Superconductivity VII, K. Yamafuji, et al.(Editors), Proceedings of the 7.sup.th International Symposium on Superconductivity (ISS'94), Nov. 8-11, 1994, Kitakyushu, Tokyo 1995, pp. 897-900.
M.E. Klausmeier-Brown, et al., "Accurate Measurement Of Atomic Beam Flux By Pseudo-Double-Beam Atomic Absorption Spectroscopy For Growth Of Thin-Film Oxide Superconductors", Applied Physics Letters, vol. 60, No. 5, Feb. 3, 1992, pp. 657-659.
Kasai Yuji
Sakai Shigeki
Agency of Industrial Science & Technology, Ministry of Internati
Evans F. L.
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