Method of measuring artifact taper

Details Method of measuring artifact taper Method of measuring artifact taper

1993-03-24

1994-09-20

Hille, Rolf

Optics: measuring and testing

Angle measuring or angular axial alignment

356371, 356147, 2503581, G01B 1126, G01C 100, G01F 2300

Patent

active

053494342

ABSTRACT:
An interferometer (14) performs three topographical measures of an artifact (12) to determine taper between opposing surfaces (50 and 52) of the artifact (12) mounted on three points of support (30, 32, and 34). Two sets of three data points (60, 62, and 64 and 68, 70, and 72) are extracted from the first topographical measure and are used to calculate irregularities in one of the opposing surfaces (50). The second two topographical measures are made of the other artifact surface (52). Taper between the opposing surfaces (50 and 52) is calculated independently of both the surface irregularities and any angular deviations of the three points of support (30, 32, and 34).

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