Method of measuring amount of organic material adsorbed to surfa

Details Method of measuring amount of organic material adsorbed to surfa Method of measuring amount of organic material adsorbed to surfa

1994-03-15

1995-06-20

Housel, James C.

Chemistry: analytical and immunological testing

Carbon containing

In an aqueous solution

134902, 436171, 436174, 436177, 1566261, G01N 3300, G01N 2174, H01L 21306

Patent

active

054260574

ABSTRACT:
A method of measuring the amount of organic material adhered to the surface of a semiconductor substrate. In the method, a metal is precipitated by bringing the reaction solution into contact with organic material on the surface of semiconductor substrate. The amount of the organic material adhered to the semiconductor substrate can be determined by detecting the amount of the metal precipitated.

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P. J. Oles et al. Anal. Chem. 1974, 46, 2197-2200.
T. Ohmi et al. J. Electrochem. Soc. 1993. 140(3), 804-810.

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