Method of measuring a voltage with an electron beam apparatus

Details Method of measuring a voltage with an electron beam apparatus Method of measuring a voltage with an electron beam apparatus

1992-03-19

1994-04-05

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3100, G01N 2300

Patent

active

053008804

ABSTRACT:
A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

REFERENCES:
patent: 4755749 (1988-07-01), Ookubo et al.
Reiners, "Fundamentals of Electron Beam Testing via Capacitative Coupling Voltage Contrast", Microelectronic Engineering, vol. 12, No. 1/4, pp. 325-340, May 1990, Amsterdam, NL.
Brust et al., "Logic-State Tracing: Electron Beam Testing by Correlation", Microelectronic Engineering, vol. 3, No. 1/4, pp. 191-202, Dec. 1985, Amsterdam, NL.
Patent Abstracts of Japan, vol. 6, No. 203 (P-148)(1081), Oct. 14, 1982 (JP 57-111457).

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