Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-02-23
1996-03-12
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
250307, G01B 734
Patent
active
054976561
ABSTRACT:
An atomic force microscope is preferably used to observe a sample surface and measure a surface profile of a sample by making use of interatomic forces existing between a probing tip and the sample surface. The atomic force microscope includes a cantilever having a probing tip, a laser diode for emitting a laser beam, a lens for focusing the laser beam emitted from the laser diode on the cantilever, and a photodiode for detecting a light beam reflected from the cantilever to thereby detect the amount of deflection of the cantilever. The atomic force microscope further includes a mechanism for finely moving one of a sample and the cantilever in three different directions, and a controller or computer for controlling the mechanism and for imaging the sample surface based on the amount of deflection of the cantilever at a plurality of locations of the sample surface. By this construction, after measurement of the sample surface at a first location thereof, the sample is moved away from the probing tip by a given length and is further moved relative to the probing tip so that the probing tip is positioned above a second location of the sample. Thereafter, the sample is further moved towards the probing tip at the second location by a length substantially equal to the given length. The movement of the sample is repeated until measurements of the sample surface at the plurality of locations thereof are completed.
REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 4889988 (1989-12-01), Elings et al.
patent: 4902892 (1990-02-01), Okayama et al.
patent: 4954704 (1990-09-01), Elings et al.
patent: 5144128 (1992-09-01), Hasegawa et al.
patent: 5162653 (1992-11-01), Hosaka et al.
patent: 5166516 (1992-11-01), Kajimura
patent: 5245863 (1993-09-01), Kajimura et al.
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5289004 (1994-02-01), Okada et al.
patent: 5336887 (1994-08-01), Yagi et al.
patent: 5412980 (1995-05-01), Elings et al.
patent: 5415027 (1995-05-01), Elings et al.
"The influence of lateral forces in scanning force microscopy", Rev. Sci. Instrum. 62(1), Jan. 1991, A. J. den Boef, 1990 American Institute of Physics, pp. 88-92.
Kado Hiroyuki
Tohda Takao
Matsushita Electric - Industrial Co., Ltd.
Noland Thomas P.
LandOfFree
Method of measuring a surface profile using an atomic force micr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of measuring a surface profile using an atomic force micr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of measuring a surface profile using an atomic force micr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2093633