Method of measuring a line edge roughness of micro objects...

Details Method of measuring a line edge roughness of micro objects... Method of measuring a line edge roughness of micro objects...

2005-06-21

2005-06-21

Couso, Yon J. (Department: 2625)

Image analysis

Applications

Surface texture or roughness measuring

C382S141000, C382S199000, C356S237200, C250S559360, C348S128000

Reexamination Certificate

active

06909791

ABSTRACT:
A line edge roughness of micro objects is determined in a microscope by corresponding scanning and determination of deviations of points of the edge from a straight line.

REFERENCES:
patent: 4750140 (1988-06-01), Asano et al.
patent: 4792232 (1988-12-01), Jobe et al.
patent: 5805728 (1998-09-01), Munesada et al.
patent: 6781688 (2004-08-01), Kren et al.
patent: 2002/0097913 (2002-07-01), Ikeda

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