Method of measuring a bevel angle in a write head

Details Method of measuring a bevel angle in a write head Method of measuring a bevel angle in a write head

2009-05-18

2011-12-13

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603130, C029S603140, C029S603150, C029S603180, C216S062000, C216S065000, C216S066000, C360S121000, C360S122000, C360S317000, C360S324000, C360S327000, C451S005000, C451S041000

Reexamination Certificate

active

08074345

ABSTRACT:
A method of measuring a bevel angle in a write pole comprises the step of providing a mask over a wafer containing the write pole. The mask has a first opening over the write pole and a second opening over a sacrificial region of the wafer. The sacrificial region comprises a same material as the write pole. The method further comprises the steps of performing a beveling operation on the write pole and the sacrificial region to form a first bevel in the write pole and a second bevel in the sacrificial region, and measuring an angle of the second bevel in the sacrificial region to determine the bevel angle of the write pole.

REFERENCES:
patent: 6564445 (2003-05-01), Hashimoto et al.
patent: 6760197 (2004-07-01), Boutaghou et al.
patent: 7469466 (2008-12-01), Beach et al.
patent: 7480983 (2009-01-01), Lo
patent: 2007/0098246 (2007-05-01), Miyatake et al.
patent: 2009/0168242 (2009-07-01), Liu
patent: 2003-051106 (2003-02-01), None

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