Method of measurement, method for providing alignment marks,...

Details Method of measurement, method for providing alignment marks,... Method of measurement, method for providing alignment marks,...

2006-10-31

2006-10-31

Toatley, jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

Reexamination Certificate

active

07130049

ABSTRACT:
In a method of measurement according to one embodiment of the invention, a relative position of a temporary alignment mark on one side of a substrate and an alignment mark on the other side of the substrate is determined, and the temporary alignment mark is removed. Before removal of the temporary alignment mark, a relative position of that mark and another mark on the same side of the substrate may be determined. The temporary alignment mark may be formed in, e.g., an oxide layer.

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Search Report for European Application No. 04257805.4-2222—dated Apr. 11, 2005.

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