Method of manufacturing ZnO substrate from ZnO crystal...

Details Method of manufacturing ZnO substrate from ZnO crystal... Method of manufacturing ZnO substrate from ZnO crystal...

2007-10-30

2007-10-30

Culbert, Roberts (Department: 1763)

Etching a substrate: processes

Nongaseous phase etching of substrate

Etching inorganic substrate

C117S002000

Reexamination Certificate

active

11392863

ABSTRACT:
Li impurities are removed from a substrate of ZnO formed by a hydrothermal synthesis method. The surface layer of the substrate with Li impurities removed, is etched to planarize the substrate.

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