Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1994-06-16
1995-11-14
Nguyen, Nam
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505475, 20419224, 20419213, H01L 3924, C23C 1434
Patent
active
054666651
ABSTRACT:
A method of manufacturing YBCO superconducting thin films is obtained which is capable of providing superconducting thin films having excellent crystallinity in a high yield by introducing a new film formation parameter in a hybrid plasma sputtering method. When a Y--Ba--Cu--O type superconducting thin film is formed by using a parallel plate sputtering method, a high-frequency voltage generated by a high-frequency power source is superimposed on a DC voltage generated by a DC power source and applied to the cathode electrode at the same time, an electrically conductive YBCO target is placed on the cathode, and the film formation conditions are controlled on the basis of the difference between the voltage drops in each ion sheath formed on the substrate and directly on the target by applying a DC voltage to a substrate holder from the DC power source.
REFERENCES:
patent: 3461054 (1969-08-01), Vratny
patent: 4931169 (1990-06-01), Scherer et al.
patent: 5057201 (1991-10-01), Fujita et al.
patent: 5180476 (1993-01-01), Ishibashi et al.
patent: 5225396 (1993-07-01), Ohtani
patent: 5236894 (1993-08-01), Tanaka et al.
patent: 5292417 (1994-03-01), Kugler
patent: 5361720 (1994-11-01), Evetts et al.
A. Nakagawa et al., "Substrate Bias and Pressure Effect on Formation of YBaCuO Thin Films in RF Magnetron Sputtering System", Japanese Journal of Applied Physics, vol. 30, No. 6A, Jun. 1991, pp. L993-L996.
W. Ito et al., "Effects of Substrate Ion Sheath During Sputtering on the Superconductivity of .alpha.-axis YBCO Films", Physica C, vol. 224, No. 3-4, pp. 384-390.
W. Ito et al., "Highest Crystallinity of .alpha.-axis YBCO Films by DC-94.92 MHz Hybrid Plasma Magnetron Sputtering", Physica C, 204, 1993, pp. 295-298.
Ito Wataru
Morishita Tadataka
Yoshida Yukihisa
International Superconductivity Technology Center
Mitsubishi Denki & Kabushiki Kaisha
Nguyen Nam
Nippon Steel Corporation
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