Method of manufacturing wireless suspension blank

Etching a substrate: processes – Gas phase and nongaseous phase etching on the same substrate

Reexamination Certificate

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Details

C216S013000, C118S7230ER, C438S108000, C360S244300, C360S245900, C360S245400, C360S294700

Reexamination Certificate

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06942817

ABSTRACT:
A wireless suspension blank is made using a two-layer laminate composed of a metallic layer with the spring property and an electrically insulating layer. The first method includes a first step for working the metallic layer by the photo etching method, a second step for forming a wiring part on the insulating layer by the semi-additive method and a third step for working the insulating layer by the wet-etching method. The second method includes a first step for working the metallic layer by the photo etching method, a second step for forming a wiring part on the insulating layer by the semi-additive method and a third step for working the insulating layer by the plasma etching method. The third method includes a first step for forming a wiring part on the metallic layer by the semi-additive method, a second step for working the metallic layer by the wet-etching method and a third step for working the insulating layer by the dry-etching method or the wet-etching method. The use of a two-layer laminate makes possible a low cost production. Further, the forming of a wiring part by the semi-additive method makes possible to working very accurately a fine wiring part.

REFERENCES:
patent: 5628869 (1997-05-01), Mallon
patent: 5839193 (1998-11-01), Bennin et al.
patent: 5970319 (1999-10-01), Banks et al.
patent: 6093476 (2000-07-01), Horiuchi et al.
patent: 2000-49195 (2000-02-01), None

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