Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-06-30
2010-11-23
Phan, Thiem (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S428000, C029S445000, C029S831000, C333S197000, C333S196000, C333S199000
Reexamination Certificate
active
07836574
ABSTRACT:
A method for fabrication of single crystal silicon micromechanical resonators using a two-wafer process, including either a Silicon-on-insulator (SOI) or insulating base and resonator wafers, wherein resonator anchors, a capacitive air gap, isolation trenches, and alignment marks are micromachined in an active layer of the base wafer; the active layer of the resonator wafer is bonded directly to the active layer of the base wafer; the handle and dielectric layers of the resonator wafer are removed; viewing windows are opened in the active layer of the resonator wafer; masking the single crystal silicon semiconductor material active layer of the resonator wafer with photoresist material; a single crystal silicon resonator is machined in the active layer of the resonator wafer using silicon dry etch micromachining technology; and the photoresist material is subsequently dry stripped.
REFERENCES:
patent: 6249073 (2001-06-01), Nguyen et al.
patent: 6296779 (2001-10-01), Clark et al.
patent: 6424074 (2002-07-01), Nguyen
patent: 6433401 (2002-08-01), Clark et al.
patent: 6490147 (2002-12-01), Yoon et al.
patent: 6566786 (2003-05-01), Nguyen
patent: 6569754 (2003-05-01), Wong et al.
patent: 6577040 (2003-06-01), Nguyen
patent: 6593831 (2003-07-01), Nguyen
patent: 6600252 (2003-07-01), Nguyen
patent: 6628177 (2003-09-01), Clark et al.
patent: 6667558 (2003-12-01), Wong et al.
patent: 6680660 (2004-01-01), Nguyen
patent: 6713938 (2004-03-01), Nguyen
patent: 6739190 (2004-05-01), Hsu et al.
patent: 6808954 (2004-10-01), Ma et al.
patent: 7011986 (2006-03-01), Daeche et al.
patent: 7202560 (2007-04-01), Dungan et al.
patent: 2003/0020565 (2003-01-01), Cornett et al.
patent: 2004/0065638 (2004-04-01), Gogoi
patent: 2005/0037534 (2005-02-01), Sawyer
Jafri Ijaz H.
Klein Jonathan L.
Magendanz Galen P.
Black Lowe & Graham PLLC
Honeywell International , Inc.
Phan Thiem
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