Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
Reexamination Certificate
2009-02-03
2010-11-30
Smith, Matthew S (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Mesa formation
C438S029000, C257S466000
Reexamination Certificate
active
07842530
ABSTRACT:
A method of manufacturing a vertical cavity surface emitting laser of a mesa structure, the method comprises: sequentially laminating on a substrate a plurality of semiconductor layers including a bottom reflecting mirror, an active layer, a selective oxidation layer and a top reflecting mirror, followed by forming a dielectric film on the laminated semiconductor layers; forming on the dielectric film a first resist pattern comprised of large and small annular opening patterns and large and small annular resist patterns around the same central axis; forming the large and small annular opening patterns in the dielectric film; forming a second resist pattern in the dielectric film so that only the small annular opening pattern is exposed, followed by forming an annular electrode in the exposed small annular opening pattern; and forming a third resist pattern over the annular electrode.
REFERENCES:
patent: 5621750 (1997-04-01), Iwano et al.
patent: 5978408 (1999-11-01), Thornton
patent: 6835959 (2004-12-01), Ouchi
patent: 7180101 (2007-02-01), Ouchi
patent: 7215692 (2007-05-01), Jewell
patent: 7244629 (2007-07-01), Ezaki et al.
patent: 7295745 (2007-11-01), Uchida
patent: 7382814 (2008-06-01), Horie
patent: 7408967 (2008-08-01), Collins et al.
patent: 7539226 (2009-05-01), Uchida
patent: 2003/0235226 (2003-12-01), Ueki
patent: 2007/0201527 (2007-08-01), Hori et al.
patent: 2007/0205724 (2007-09-01), Schaefer et al.
patent: 2008/0205462 (2008-08-01), Uchida
patent: 2008/0304532 (2008-12-01), Uchida
patent: 2009/0010297 (2009-01-01), Uchida
patent: 2009/0074026 (2009-03-01), Nagatomo et al.
patent: 2009/0080489 (2009-03-01), Uchida et al.
patent: 2009/0135872 (2009-05-01), Uchida et al.
patent: 2009/0135876 (2009-05-01), Takeuchi et al.
patent: 2009/0196319 (2009-08-01), Hori et al.
patent: 2009/0231562 (2009-09-01), Yoshii et al.
patent: 2000-332355 (2000-11-01), None
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Smith Matthew S
Tobergte Nicholas
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