Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Ordered or disordered
Patent
1996-02-16
1999-11-02
Dutton, Brian
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Ordered or disordered
438 47, H01L 2906, H01L 3922, H01L 2940
Patent
active
059769050
ABSTRACT:
An array of infrared vertical cavity surface-emitting lasers (VCSELs) and method of manufacturing the same is disclosed which reduces device-to-device non-uniformity for VCSEL arrays manufactured using well-known vapor phase epitaxial processes. The method involves growing layers comprising a standard infrared VCSEL array using a vapor phase epitaxial process on a substrate which is mosoriented from the (100) plane in the {111}A direction by preferably between eight and twelve degrees or more.
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Gerald B. Stringfellow, "Organometallic Vapor-Phase Epitaxy: Theory and Practice", Academic Press, Inc (London) Ltd., pp. 204-212, 1989.
Bryan Robert P.
Cockerill Timothy M.
Cielo Communications, Inc.
Dutton Brian
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