Method of manufacturing transparent electro-conductive film

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...

Reexamination Certificate

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C204S192100

Reexamination Certificate

active

07153544

ABSTRACT:
A touch panel includes a transparent electro-conductive film. The transparent electro-conductive film comprises a primary layer formed on a polymer film, and a transparent electro-conductive thin film or a multi-lamination film composed of at least one metal-compound layer and at least one electro-conductive-metal layer is formed on the primary layer. The primary layer is made of silicon compound. The primary layer is formed by sputtering, using a target having a density of 2.9 g/cm3or more.

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patent: 6617056 (2003-09-01), Hara et al.
patent: 06293956 (1994-10-01), None
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patent: 2000351170 (2000-12-01), None
patent: WO 200016251 (2000-03-01), None

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