Method of manufacturing thin film transistor array panel and...

Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Electrical excitation of liquid crystal

Reexamination Certificate

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C257S797000

Reexamination Certificate

active

10877590

ABSTRACT:
A method of manufacturing a thin film transistor array panel is provided, which includes: forming a gate line including a gate electrode on a substrate; depositing a gate insulating layer; forming a semiconductor layer on the gate insulating layer; forming an ohmic contact layer on the semiconductor layer; forming a data line including a source electrode and a drain electrode on the ohmic contact layer at least in part; forming an alignment key including the same layer as the data line; coating a first photosensitive film for a color filter; aligning a mask for color filter with the substrate provided with the first photosensitive film using the alignment key; forming a first color filter by light exposure and developing the first photosensitive film; and forming a pixel electrode connected to the drain electrode.

REFERENCES:
patent: 5910830 (1999-06-01), Nam
patent: 6373548 (2002-04-01), Kim
patent: 6734931 (2004-05-01), Yu
patent: 6787930 (2004-09-01), Nakata et al.
patent: 6803975 (2004-10-01), Kim et al.

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