Metal working – Piezoelectric device making
Reexamination Certificate
2005-08-23
2005-08-23
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S846000, C310S340000, C310S348000, C156S254000, C156S275500, C156S327000, C427S100000
Reexamination Certificate
active
06931700
ABSTRACT:
A method for making thin film piezoelectric elements including forming a flat-plate laminate by laminating a first electrode layer, a piezoelectric thin film, and a second electrode layer, on one surface of an element forming substrate, and forming on the one surface a plurality of thin film piezoelectric elements including connecting electrodes for electrically connecting the first electrode layer and the second electrode layer to external equipment, including forming the element holding layer including resin over the one surface of the substrate including the thin film piezoelectric elements; bonding the one surface of the substrate, opposed to a temporary fixing substrate and covered with the element holding layer, on the temporary fixing substrate by using a fixing resin; covering a peripheral area with a specified width; and removing the element forming substrate by etching in an area other than the area covered with the fixing resin, and separating the thin film piezoelectric elements held by the element holding layer, into individually separate elements or groups of elements.
REFERENCES:
patent: 5166570 (1992-11-01), Takahashi
patent: 5640746 (1997-06-01), Knecht et al.
patent: 59-98140 (1984-06-01), None
patent: 60-180109 (1985-09-01), None
patent: 02-003995 (1990-01-01), None
patent: 04-170077 (1992-06-01), None
patent: 5-335864 (1993-12-01), None
patent: 11-345833 (1999-12-01), None
Takeuchi et al., “Novel 1-3 Piezo-composites Using Synchrotron Radiation Lithography and Its Application for High frequency Medical Imaging Arrays”, 1997 Ultrasonics Symposium, IEEE Proceedings, vol. 2, Oct. 5, 1997, pp. 919-922.
Parkhurst & Wendel L.L.P.
Tugbang A. Dexter
LandOfFree
Method of manufacturing thin film piezoelectric elements does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of manufacturing thin film piezoelectric elements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing thin film piezoelectric elements will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3497142