Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-05-22
2007-05-22
Kim, Paul D. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603080, C029S603150, C029S603180, C216S039000, C216S041000, C216S048000, C360S125330, C360S317000, C451S005000, C451S041000
Reexamination Certificate
active
10631624
ABSTRACT:
The method of manufacturing a thin film magnetic head is capable of precisely forming a core section with preventing the variation of the write-core head caused by ion milling for removing an electric conductive film and capable of improving yield of products. The method of manufacturing a thin film magnetic head, in which a core section having prescribed write-core width is formed by applying ion milling to an upper magnetic pole and a lower magnetic pole, comprises the steps of examining the write-core width of the core section; covering a surface of the core section with a protection film except an electric conductive film for preventing electro static charge of a wafer; and removing the exposed electric conductive film by ion milling.
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“Highly defined narrow track write heads fabricated by focused ion beam trimming with the A12O3 refilling process”; Ishi, T.; Nonaka, Y.; Matsubara, T.; Ishiwata, N.; Magnetics, vol. 35, Issue 5, part 1, Sep. 1999; pp. 2541-2543.
Fujitsu Limited
Greer Burns & Crain Ltd.
Kim Paul D.
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