Coating processes – Measuring – testing – or indicating
Patent
1993-06-22
1994-12-13
Beck, Shrive
Coating processes
Measuring, testing, or indicating
427 9, 427 10, 427 64, 4271262, 4272552, 427566, 427585, B05D 512
Patent
active
053728378
ABSTRACT:
A method of manufacturing a thin film electroluminescent (EL) device in which an electron beam is directed to a pellet of a substance containing an additive agent, and the substance is evaporated and deposited on a substrate and a change per unit time of the growing deposit is monitored by a sensor, comprising the steps of (1) controlling energy of the electron beam in accordance with an output of the sensor during a first time interval for adjusting an evaporation rate of the substance to a specified rate, (2) maintaining the controlled energy of the electron beam constant during a second time interval, larger than the first time interval and alternatively repeating steps (1) and (2).
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Inohara Akio
Isaka Kinichi
Kishishita Hiroshi
Nakamura Noriaki
Shimoyama Hiroyuki
Beck Shrive
Sharp Kabushiki Kaisha
Utech Benjamin L.
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