Method of manufacturing thin film circuits

Details Method of manufacturing thin film circuits Method of manufacturing thin film circuits

1984-02-07

1985-01-29

Morgenstern, Norman

Chemistry: electrical and wave energy

Processes and products

204 38A, 427 79, 427102, 427103, 427 96, 427123, 4271263, 4273833, 156656, H01C 1700

Patent

active

044964358

ABSTRACT:
A thin film circuit including resistor elements and capacitor elements is prepared by forming a tantalum film for capacitor on an insulating substrate, forming a tantalum film for resistor over the substrate, covering a predetermined region of the tantalum resistor film with a titanium film, heat treating a resulting assembly, removing the titanium film, and then covering the predetermined region with a metal film to provide ohmic contact therebetween.

REFERENCES:
patent: 3607679 (1971-09-01), Melroy
patent: 4251326 (1981-02-01), Arcidiacono et al.
"Integrated Tantalum Film RC Circuits" by W. H. Orr et al., Proceedings, 1970, 20th Electronic Components Conference, pp. 602-612, particularly, FIG. 6.

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