Method of manufacturing thermopile infrared detector

Details Method of manufacturing thermopile infrared detector Method of manufacturing thermopile infrared detector

1990-09-21

1991-10-22

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437903, 437974, 148DIG135, 357 28, H01L 3118

Patent

active

050595431

ABSTRACT:
A thermopile detector is disclosed consisting of a semiconductor supporting rim which is doped across all of the rim. The rim supports a series of polycrystalline silicon and metal thermocouples. The fully doped semiconductor area serves as an etch stop for a single-sided etch which eliminates the need for front-to-back alignment of the device. The semiconductor doped rim also serves as a good thermal condutor for supporting the cold junctions. The hot junctions of the thermocouples may be supported by a thin dielectric membrane spanning the device and the cold junctions are formed on the doped rim. The thin dielectric window provides thermal isolation between the semiconductor rim and the center of the window where the hot junctions are located. The thermocouple material layers may be stacked to enable greater thermocouple denisty on the device. Refractory metals may be employed as the thermocouple metal, to increase sensitivity.

REFERENCES:
patent: 3424626 (1969-01-01), Coless et al.
patent: 3644913 (1972-02-01), Matsui et al.
patent: 4111717 (1978-09-01), Baxter
patent: 4343960 (1982-08-01), Eguchi et al.
patent: 4456919 (1984-06-01), Tomita et al.
patent: 4558342 (1985-12-01), Sclar
patent: 4602642 (1986-07-01), O'Hara et al.
patent: 4665276 (1987-05-01), Elbel et al.
patent: 4722612 (1988-02-01), Junkert et al.
patent: 4782708 (1988-11-01), Harrington et al.
patent: 4795498 (1989-01-01), Germanton et al.
patent: 4897360 (1990-01-01), Gunkel et al.
"A Monolithic Thermopile Detector Fabricated Using Integrated-Circuit Technology", Tech. Rpt. 150, G. R. Lahiji, Dept. of Electrical and Computer Engineering, U. of Michigan, Ann Arbor, MI (Jun. 1981).
"Thermopiles Fabricated Using Silicon Planar Technology", Sensors and Actuators 3, (1982/83) g. Nieveld, pp. 179-183.
"A Batch-Fabricated Silicon Thermopile Infrared Detector", IEEE Transactions on Electron Devices, G. R. Lahiji and Kensall D. Wise, vol. ED-29, No. 1, Jan., 1982, pp. 14-22.
"A Linear Thermopile Infrared Detector Array with On-Chip Triplexing", Proceedings of Internat'l. Conf. on Solid-State Sensors and Actuators-Transducers '85, I. H. Choi and K. D. Wise, Jun. 11-14, 1985, pp. 132-135.
"The Role of Thin Films in Integrated Solid-State Sensors", J. Vac. Sci. Technol. A 4(3), K. D. Wise, May/Jun 1986, pp. 617-622.
"A Silicon-Thermopile-Based Infrared Sensing Array for Use in Automated Manufacturing", IEEE Transactions on Electronic Devices, I. H. Choi and Kensall D. Wise, vol. ED-33, No. 1, Jan. 1986, pp. 72-79.
"A Silicon-Based Thermopile Infrared Detector Array Containing On-Chip Read-Out Circuitry", Tech. Rpt. 176, I. H. Choi, Dept. of Electrical Engineering and Computer Science, U. of Michigan, Ann Arbor, MI (May 1986).
"Intelligent Sensors for Semiconductor Process Automation", Proceedings of IECON, K. D. Wise, Sep./Oct. 1986, pp. 213-217.
"An Integrated Thermal Infrared Sensing Array", Sensors and Actuators, 14 (1988), P. M. Sarro, H. Yashiro, A. W. v. Herwaarden, S. Middelhoek, pp. 191-200.
"An Infrared Sensing Array Based on Integrated Silicon Thermopiles", Transducers '87, P. M. Sarro, H. Yashiro, A. W. v. Herwaarden, S. Middelhoek, pp. 227-230.
"Floating-Membrane Thermal Vacuum Sensors", Transducers '87, A. W. van Herwaarden, P. M. Sarro, pp. 287-290.
"Integrated Thermopile Sensors", Sensors and Actuators, A21-A23, A. W. van Herwaarden, D. C. Vay Duyn, B. W. van Oudheusden, P. M. Sarro, 1989, pp. 621-630.

Affiliated with

Also associated with

Rating

Method of manufacturing thermopile infrared detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing thermopile infrared detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing thermopile infrared detector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-107980