Method of manufacturing the organic electroluminescent...

Details Method of manufacturing the organic electroluminescent... Method of manufacturing the organic electroluminescent...

2011-03-29

2011-03-29

Lee, Eugene (Department: 2891)

Semiconductor device manufacturing: process

Having organic semiconductive component

C257SE51001, C257SE51002, C257SE25008, C257SE25009, C438S069000, C118S720000

Reexamination Certificate

active

07915073

ABSTRACT:
The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.

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